I. A. Shareef

Modeling of multilevel structures: a general method for analyzing stress evolution during processing

Arturo Cifuentes, I. A. Shareef, I. Shareef, 1992 .

Real‐time process and product diagnostics in rapid thermal chemical vapor deposition using in situ mass spectrometric sampling

Gary W. Rubloff, Gregory N. Parsons, I. A. Shareef, 1995 .

Subatmospheric chemical vapor deposition ozone/TEOS process for SiO2 trench filling

Gary W. Rubloff, I. A. Shareef, G. Rubloff, 1995 .

Thermoelastic behavior of x-ray lithography masks during irradiation

Juan R. Maldonado, I. A. Shareef, Y. Vladimirsky, 1990 .

Role of gas phase reactions in subatmospheric chemical‐vapor deposition ozone/TEOS processes for oxide deposition

Gary W. Rubloff, I. A. Shareef, W. N. Gill, 1996 .