B. V. Yakshinskiy

Interaction of benzene and toluene vapors with Ru(0001) surface: relevance to MLM contamination

B. V. Yakshinskiy, Q. Shen, Robert A. Bartynski, 2011, Advanced Lithography.

Carbon film growth on model MLM cap layer: interaction of selected hydrocarbon vapor with Ru(10-10) surface

B. V. Yakshinskiy, Robert A. Bartynski, R. Bartynski, 2010, Advanced Lithography.

Carbon film growth on model electron-irradiated MLM cap layer: interaction of benzene and MMA vapor with TiO2 surface

Roman Caudillo, Theodore E. Madey, B. V. Yakshinskiy, 2009, Advanced Lithography.

Measuring the EUV-induced contamination rates of TiO2-capped multilayer optics by anticipated production-environment hydrocarbons

Thomas B. Lucatorto, Charles S. Tarrio, Shannon B. Hill, 2009, Advanced Lithography.

THERMAL DESORPTION OF SODIUM ATOMS FROM THIN SiO2 Films

Theodore E. Madey, B. V. Yakshinskiy, T. Madey, 2000 .