Sergiy Yulin

Advanced coatings for next generation lithography

Andreas Tünnermann, Norbert Kaiser, Philipp Naujok, 2015, Advanced Lithography.

Optical performance of LPP multilayer collector mirrors

Andreas Tünnermann, Torsten Feigl, Sven Schröder, 2012, Advanced Lithography.

Lifetime and refurbishment of multilayer LPP collector mirrors

Andreas Tünnermann, Torsten Feigl, Norbert Kaiser, 2013, Advanced Lithography.

EUV multilayer mirrors with enhanced stability

Torsten Feigl, Sergiy Yulin, Norbert Kaiser, 2006, SPIE Optics + Photonics.

Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments

Sergiy Yulin, Thomas B. Lucatorto, Charles S. Tarrio, 2008, SPIE Advanced Lithography.

High-performance multilayer coatings for 106 nm

Torsten Feigl, Sergiy Yulin, Norbert Kaiser, 2007, SPIE Optical Engineering + Applications.

Optical reflector coatings for astronomical applications from EUV to IR

Torsten Feigl, Steffen Wilbrandt, Olaf Stenzel, 2012, Other Conferences.

Mo/Si multilayers with enhanced TiO2- and RuO2-capping layers

Torsten Feigl, Ming Fang, Manish Chandhok, 2008, SPIE Advanced Lithography.