Mi-Rim Jung

Evaluation of partial coherent imaging using the transfer function in immersion lithography

Jaisoon Kim, Hye-Keun Oh, Seongbo Shim, 2006, SPIE Advanced Lithography.

Simulation of mask induced polarization effect on imaging in immersion lithography

Hye-Keun Oh, Sook Lee, Dai-Gyoung Kim, 2006, SPIE Advanced Lithography.

Reflow modeling for elongated contact hole shape

Ji-Eun Lee, Jong-Sun Kim, Hye-Keun Oh, 2006, SPIE Advanced Lithography.