Hiroaki Uetake

Piezoelectric resonator, wafer therefor, method of manufacturing the same, oscillator, radio wave clock, and electronic equipment

Takashi Tamura, Hiroaki Uetake, 植竹 宏明, 2005 .

Perfect-Selectivity Directional Etching of Silicon Using Ultraclean ECR Plasma

Tadahiro Ohmi, Hiroaki Uetake, Nobuo Mikoshiba, 1989 .

Anisotropic etching of n+ polycrystalline silicon with high selectivity using a chlorine and nitrogen plasma in an ultraclean electron cyclotron resonance etcher

Tadahiro Ohmi, Hiroaki Uetake, Nobuo Mikoshiba, 1990 .

Directional etching of Si with perfect selectivity to SiO2 using an ultraclean electron cyclotron resonance plasma

Tadahiro Ohmi, Hiroaki Uetake, Nobuo Mikoshiba, 1990 .

Enhancement of Sensitivity on Miniaturized Thin-film Magnetoimpedance with Ellipsoidal Element

Tomoo Nakai, Shin Yabukami, Hiroaki Uetake, 2015 .