文
论文分享
演练场
杂货铺
论文推荐
字
编辑器下载
登录
注册
S.B. Brown
发表
Materials reliability in MEMS devices
S.B. Brown, W. van Arsdell, C.L. Muhlstein, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).