Naoaki Yamaguchi

Process variation monitoring (PVM) by wafer inspection tool as a complementary method to CD-SEM for mapping LER and defect density on production wafers

Doron Meshulach, Shimon Levi, Kobi Kan, 2009, Advanced Lithography.

VISUALIZATION OF MASSIVE MOTION DATA USING GEOMETRIC FEATURES(International Workshop on Advanced Image Technology 2006)

Shigeru Kuriyama, Naoaki Yamaguchi, 2006 .