Stefan Völlmeke

Shortening of the process chain by tactile inline measurement

Lutz Doering, Arndt Steinke, Thomas Frank, 2013, Microtechnologies for the New Millennium.

Performance of a novel micro force vector sensor and outlook into its biomedical applications

Roland Werthschützky, Thorsten Meiss, Tim Rossner, 2011, Microtechnologies.

Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices

Hutomo Suryo Wasisto, Uwe Brand, Lutz Doering, 2015, Microtechnologies for the New Millennium.

Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

Min Xu, Uwe Brand, Lutz Doering, 2019, Sensors.