John S. Taylor

Ultra-high accuracy optical testing: creating diffraction-limited short-wavelength optical systems

Anton Barty, Regina Soufli, Erik H. Anderson, 2005, SPIE Optics + Photonics.

Substrate smoothing for high-temperature condenser operation in EUVL source environments

Regina Soufli, Eberhard Spiller, Eric M. Gullikson, 2005, SPIE Advanced Lithography.

Multilayer optics for an extreme-ultraviolet lithography tool with 70-nm resolution

Regina Soufli, Stanley Mrowka, Claude Montcalm, 2001, SPIE Advanced Lithography.