Lfp Pascal Etman

Characterization of Flow Variability in Semiconductor Manufacturing using Effective Process Times

Jacobus E. Rooda, J. H. Jacobs, Lfp Pascal Etman, 1996 .

RESEARCH ARTICLE Lumped Parameter Modeling of the Litho Cell

A.A.A. Kock, Jacobus E. Rooda, Lfp Pascal Etman, 2009 .

LUMPED PARAMETER MODELING OF THE LITHO CELL

A.A.A. Kock, Jacobus E. Rooda, Lfp Pascal Etman, 2006 .

Analytical Target Cascading: numerical convergence evaluation and manufacturing system application

Lfp Pascal Etman, J. E. Rooda, M. F. Hulshof, 2001 .