Kazimierz W. Wirpszo

Vacuum spark and spherical pinch x-ray/EUV point sources

Frank F. Wu, Emilio Panarella, Wen-Chieh Tang, 1999, Advanced Lithography.

Vacuum spark point source for x-ray/EUV lithography

Emilio Panarella, Meisheng Xu, Rubin Ye, 2001, SPIE Advanced Lithography.

Vacuum spark for soft x-rays and the spherical pinch for EUV as point sources for microlithography

Frank F. Wu, Emilio Panarella, Meisheng Xu, 2000, Advanced Lithography.