Jung-hyun Kang

Massive metrology and failure identification for DRAM applications (Conference Presentation)

Chang-Moon Lim, Jin-Woo Lee, Harm Dillen, 2019 .

Study on the reduction of defects in immersion lithography

Junggun Heo, Keundo Ban, Cheol-Kyu Bok, 2007, SPIE Advanced Lithography.

Hardware, materials, and parameters optimization for improvement of immersion overlay

Chang-Moon Lim, Seung-Chan Moon, Won-Kwang Ma, 2007, SPIE Advanced Lithography.

Alignment system and process optimization for improvement of double patterning overlay

Chang-Moon Lim, Seung-Chan Moon, Won-Kwang Ma, 2008, SPIE Advanced Lithography.

Investigation of systematic CD distribution error on intrafield

Jung-hyun Kang, Keunjun Kim, Hyeong-Soo Kim, 2016, Advanced Lithography.