H. Kikuta
发表
M. Fujioka,
S. Sakai,
Y. Wakahara,
1993,
IEEE Communications Magazine.
Automatic dose optimization system for resist cross-sectional profile in a electron beam lithography
H. Kikuta,
Y. Hirai,
T. Yotsuya,
2000,
Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387).
H. Kikuta,
Y. Hirai,
Y. Hirai,
1998,
Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).