Chang-Hoon Ryu

High-precision self-tool CD matching with focus-target assist pattern by computational ways

Ki-Ho Baik, Young-Seok Kim, Sung-Il Kim, 2014, Advanced Lithography.

The use of computational inspection to identify process window limiting hotspots and predict sub-15nm defects with high capture rate

Lei Liu, Jae-Min Shin, Dong-Woon Park, 2017, Advanced Lithography.

Lens heating impact analysis and controls for critical device layers by computational method

Ki-Ho Baik, Chan-Hoon Park, Young Seog Kang, 2013, Advanced Lithography.