J. Svennebrink

MEMS switches and other RF components fabricated using CMOS postprocess compatible surface micromachining

B. Wenk, P. Ericsson, M. Hedstrom, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).