W. D. Su

Pits reduction for poly Buffer LOCOS in VLSI fabrication

C. H. Cheng, C. C. Chang, W. D. Su, 1991, 1991 International Symposium on VLSI Technology, Systems, and Applications - Proceedings of Technical Papers.

Double spacer technique for titanium self-aligned silicidation technology

S. W. Chang, W. D. Su, 1991, 1991 International Symposium on VLSI Technology, Systems, and Applications - Proceedings of Technical Papers.