Chunhong Zhou

Influence of Colloidal Abrasive Size on Material Removal Rate and Surface Finish in SiO2 Chemical Mechanical Polishing

Chunhong Zhou, Lei Shan, J. Robert Hight, 2002 .

Mechanical interactions and their effects on chemical mechanical polishing

Chunhong Zhou, Steven Danyluk, S. Danyluk, 2001 .