Neil Judell

Generic vibration criteria for nanotechnology experiments

Peter Heiland, A. Michael Fraumeni, Neil Judell, 2005, SPIE Optics + Photonics.

Approaching new metrics for wafer flatness: an investigation of the lithographic consequences of wafer non-flatness

Noel Poduje, Jaydeep Sinha, Youri van Dommelen, 2004, SPIE Advanced Lithography.