Michel Bruel

发表

Transfert de circuits SOI sur substrat transparent par adhésion moléculaire

Bernard Aspar, Marc Zussy, Beatrice Biasse, 1999 .

Type of integrated circuit itself has decoupling capacity, and method for making such a circuit

Marc Belleville, Michel Bruel, 1998 .

The limiting device and control the temperature of a target based on a holder in a vacuum chamber and receiving an energy beam and its application to thermal measurements

Michel Bruel, A. Soubie, 1982 .

Application of hydrogen ion beams to Silicon On Insulator material technology

Michel Bruel, M. Bruel, 1996 .

New conditions for synthesizing SOI structures by high dose oxygen implantation

Michel Bruel, J. Margail, J. Stoemenos, 1985 .

CMOS/SOI hardening at 100 Mrad (SiO/sub 2/)

B. Giffard, Michel Bruel, J. Margail, 1990 .

TRANSFER OF STRUCTURED AND PATTERNED THIN SILICON FILMS USING THE SMART-CUT PROCESS

Bernard Aspar, Marc Zussy, Michel Bruel, 1996 .

Transfer of 3 in GaAs film on silicon substrate by proton implantation process

Bernard Aspar, Marc Zussy, Michel Bruel, 1998 .

SiO2 buried layer formation by subcritical dose oxygen ion implantation

Michel Bruel, J. Margail, J. Stoemenos, 1986 .

Wafer bonding and H-implantation mechanisms involved in the Smart-cut® technology

Bernard Aspar, Michel Bruel, Christophe Maleville, 1997 .

CMOS/SOI HARDENING AT 100 MRAD(Si0,)

B. Giffard, Michel Bruel, J. Margail, 2013 .

Silicon-on-insulator by oxygen implantation: an advanced technology

Michel Bruel, J. Margail, J. Stoemenos, 1988 .

The History, Physics, and Applications of the Smart-Cut® Process

Michel Bruel, M. Bruel, 1998 .

From substrate to VLSI: investigation of hardened SIMOX without epitaxy, for dose, dose rate and SEU phenomena

A. Umbert, B. Giffard, Michel Bruel, 1988 .

Smart-Cut® process using metallic bonding: Application to transfer of Si, GaAs, InP thin films

Bernard Aspar, Michel Bruel, E. Jalaguier, 1999 .

Reduced defect density in silicon‐on‐insulator structures formed by oxygen implantation in two steps

Michel Bruel, J. Margail, J. Stoemenos, 1989 .

Smart-Cut® Technology: an Industrial Application of Ion Implantation Induced Cavities

Michel Bruel, H. Moriceau, Christophe Maleville, 1998 .