J. Guastavino

Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches

Patrick Pons, Robert Plana, Mohamed Lamhamdi, 2008, Microelectron. Reliab..

Voltage and temperature effect on dielectric charging for RF-MEMS capacitive switches reliability investigation

Patrick Pons, Robert Plana, Fabio Coccetti, 2008, Microelectron. Reliab..

Charging-Effects in RF capacitive switches influence of insulating layers composition

Patrick Pons, Robert Plana, L. Bouscayrol, 2006, Microelectron. Reliab..

Si3N4 Thin Films Proprerties for RF-MEMS Reliability Investigation

P. Pons, R. Plana, Y. Segui, 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.