Naoto Sugino

发表

Nanoimprint lithography using disposable biomass template

Atsushi Sekiguchi, Yoko Matsumoto, Satoshi Takei, 2016, SPIE Advanced Lithography.

Approach of UV nanoimprint lithography using template with gas-permeable and gaseous adsorption for reduction of air-trapping issue

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2016, Photomask Technology.

Utilization of gas permeable metal plate for the purpose of reduction of transfer defect in MEMS electronic device

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2018, Remote Sensing.

Internal structure of metal material with gas permeability function related to MEMS devices

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2018, Remote Sensing.

Nanoimprint lithography using gas permeable template II

Atsushi Sekiguchi, Yoko Matsumoto, Satoshi Takei, 2018, Advanced Lithography.

Production and evaluation of measuring equipment for share viscosity of polymer melts included nanofiller with injection molding machine

Satoshi Takei, Naoto Sugino, Takao Kameda, 2016, Photomask Technology.

Evaluation of the properties of the permeability film material using cellulose nanofibers

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2016, Photomask Technology.

Temperature dependency of mechanical properties for crystalline cellulose added to silicone elastomer

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2017, NanoScience + Engineering.

Organic-inorganic hybrid resist materials in advanced lithography

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2017, NanoScience + Engineering.

Nanoimprint lithography using gas permeable template

Atsushi Sekiguchi, Yoko Matsumoto, Satoshi Takei, 2017, Advanced Lithography.

Temperature dependence of viscoelasticity of crystalline cellulose with different molecular weights added to silicone elastomer

Satoshi Takei, Makoto Hanabata, Naoto Sugino, 2017, NanoScience + Engineering.

High resolution patterning of ultraviolet cross-linked resins using gas permeable mold derived from cellulose in nanoimprint lithography

Atsushi Sekiguchi, Yoko Matsumoto, Satoshi Takei, 2017, NanoScience + Engineering.

Green Lithography Using Water-Developable Sugar-Based Negative Resist Materials

Takao Kameda, Satoshi Takei, Makoto Hanabata, 2016 .

Ecofriendly ethanol-developable processes for electron beam lithography using positive-tone dextrin resist material

Takahiro Kozawa, Seiichi Tagawa, Akihiro Oshima, 2017 .

Characterization of Gas Permeable Template Material for Nanoimprinting

Takao Kameda, Atsushi Sekiguchi, Satoshi Takei, 2017 .