Dong-ryul Lee

Accelerating litho technology development for advanced design node flash memory FEOL by next-generation wafer inspection and SEM review platforms

Byoung-Ho Lee, Ho-Kyu Kang, Rahul Lakhawat, 2012, Advanced Lithography.

Optical analysis on the wafer defect inspection for yield enhancement

Byoung-Ho Lee, Ho-Kyu Kang, Jeong-Ho Ahn, 2013, Advanced Lithography.

Nanoimprint template fabrication using wafer pattern for sub-30nm

Jongwoon Park, Chan-Hoon Park, Kyung-Sang Cho, 2010, Advanced Lithography.