J. E. Lee

Accelerating litho technology development for advanced design node flash memory FEOL by next-generation wafer inspection and SEM review platforms

Byoung-Ho Lee, Ho-Kyu Kang, Rahul Lakhawat, 2012, Advanced Lithography.

Optical analysis on the wafer defect inspection for yield enhancement

Byoung-Ho Lee, Ho-Kyu Kang, Jeong-Ho Ahn, 2013, Advanced Lithography.