Helmut Schift

发表

How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses

Robert Kirchner, Nachiappan Chidambaram, Mirco Altana, 2017, LASE.

Selective surface smoothening of 3D micro-optical elements

Robert Kirchner, Nachiappan Chidambaram, Mirco Altana, 2017, Advanced Lithography.

Nanoimprint lithography process chains for the fabrication of micro- and nanodevices

Helmut Schift, 2014, Advanced Lithography.

Depth-profiling of vertical material contrast after VUV exposure for contact-free polishing of 3D polymer micro-optics

Robert Kirchner, Nachiappan Chidambaram, Helmut Schift, 2017, European Mask and Lithography Conference.

Miniaturized focusing fan-out elements: design, fabrication, and characterization

Hans Peter Herzig, Helmut Schift, Markus Rossi, 1998, Other Conferences.

mr-PosEBR: a novel positive tone resist for high resolution electron beam lithography and 3D surface patterning

Robert Kirchner, Helmut Schift, Anja Voigt, 2016, SPIE Advanced Lithography.

Achieving mass fabrication of microoptical systems by combining deep-x-ray lithography, electroforming, micromolding, and embossing

Andreas Ruf, Helmut Schift, Holger Loewe, 1994, Integrated Optoelectronics.

Fabrication of replicated high-precision insert elements for micro-optical bench arrangements

Helmut Schift, Juergen Soechtig, F. Glaus, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Nanoimprint lithography process chains for the fabrication of micro- and nanodevices

Helmut Schift, Per Magnus Kristiansen, Prabitha Urwyler, 2014 .

Replicated diffractive optical lens components for laser-diode-to-fiber coupling in optical bench arrangements

Helmut Schift, Bruce D. Patterson, Juergen Soechtig, 1997, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Micro- and nanostructured polymer substrates for biomedical applications

Helmut Schift, Bert Müller, Uwe Pieles, 2012, Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

Benchmarking surface selective vacuum ultraviolet and thermal postprocessing of thermoplastics for ultrasmooth 3-D-printed micro-optics

Robert Kirchner, Nachiappan Chidambaram, Helmut Schift, 2018 .

Surface smoothening of the inherent roughness of micro-lenses fabricated with 2-photon lithography

Robert Kirchner, Nachiappan Chidambaram, Mirco Altana, 2018, Micro + Nano Materials, Devices, and Applications.

The use of automatic demolding in nanoimprint lithography processes

Helmut Schift, Tomi Haatainen, Aritz Retolaza, 2007 .

Next-generation lithography – an outlook on EUV projection and nanoimprint

Helmut Schift, H. Schift, Jan van Schoot, 2017 .

High-resolution grayscale patterning using extreme ultraviolet interference lithography

Robert Kirchner, Yasin Ekinci, Helmut Schift, 2017 .

Nano-Mechanical Transduction of Polymer Micro-Cantilevers to Detect Bio-Molecular Interactions

Prabitha Urwyler, Helmut Schift, Bert Müller, 2012, Biointerphases.

Hot embossing in polymers as a direct way to pattern resist

Helmut Schift, Jens Gobrecht, H. Schift, 1998 .

Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Robert Kirchner, Helmut Schift, Arne Schleunitz, 2014, Nano Convergence.

The deposition of anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossing

Helmut Schift, A. Schneuwly, B. Schnyder, 1999 .

Energy-based thermal reflow simulation for 3D polymer shape prediction using Surface Evolver

Robert Kirchner, Helmut Schift, Arne Schleunitz, 2014 .

Nanostructuring of polymers and fabrication of interdigitated electrodes by hot embossing lithography

Helmut Schift, Jens Gobrecht, H. Schift, 1999 .

Nanoreplication in polymers using hot embossing and injection molding

Helmut Schift, Laura J. Heyderman, Jens Gobrecht, 2000 .

Measurement of demolding forces in full wafer thermal nanoimprint

Helmut Schift, Santos Merino, Jens Gobrecht, 2008 .

Surface patterned polymer micro-cantilever arrays for sensing

Prabitha Urwyler, Mirco Altana, Helmut Schift, 2011 .

Flow behaviour of thin polymer films used for hot embossing lithography

Helmut Schift, Laura J. Heyderman, Jens Gobrecht, 2000 .

Air-suspended two-dimensional polymer photonic crystal slab waveguides fabricated by nanoimprint lithography

Choon-Gi Choi, Jin Tae Kim, Helmut Schift, 2007 .

High volume fabrication of customised nanopore membrane chips

Helmut Schift, Laura J. Heyderman, Louis Tiefenauer, 2003 .

Effect of nanoimprint on the elastic modulus of PMMA

Robert Kirchner, Helmut Schift, Massimo Tormen, 2016 .

Selective Surface Smoothening of Polymer Microlenses by Depth Confined Softening

Robert Kirchner, Nachiappan Chidambaram, Mirco Altana, 2017 .

Properties of thin anti-adhesive films used for the replication of microstructures in polymers

Helmut Schift, G. Margaritondo, G. Margaritondo, 1997 .

Nanoimprint Lithography – Patterning of Resists Using Molding

Anders Kristensen, Helmut Schift, A. Kristensen, 2010 .

Coarse-grain method for modeling of stamp and substrate deformation in nanoimprint

S. I. Zaitsev, Helmut Schift, A. A. Svintsov, 2007 .

ZEP520A - A resist for electron-beam grayscale lithography and thermal reflow

Robert Kirchner, I. Vartiainen, Nachiappan Chidambaram, 2016 .

Nanoimprint lithography: 2D or not 2D? A review

Helmut Schift, H. Schift, 2015, Applied Physics A.

Mechanical and Chemical Stability of Injection-Molded Microcantilevers Used for Sensing

Prabitha Urwyler, Helmut Schift, Bert Müller, 2013 .

Photonic band gaps and defect modes of polymer photonic crystal slabs

Sang-Pil Han, Choon-Gi Choi, Helmut Schift, 2005 .

Perforated polymer membranes fabricated by nanoimprint

Helmut Schift, Jens Gobrecht, H. Schift, 2006 .

Novel thermoplastic polymers with improved release properties for thermal NIL

Gabi Gruetzner, F. Reuther, M. Vogler, 2011 .

Fabrication of polymer photonic crystals using nanoimprint lithography

Sang-Pil Han, Choon-Gi Choi, Helmut Schift, 2005 .

Controlled co-evaporation of silanes for nanoimprint stamps

Helmut Schift, Uwe Pieles, Celestino Padeste, 2005 .

Pattern formation in hot embossing of thin polymer films

Helmut Schift, Laura J. Heyderman, M. Auf der Maur, 2001 .

High-throughput fabrication of compact and flexible bilayer nanowire grid polarizers for deep-ultraviolet to infrared range

Li Wang, Yasin Ekinci, Konstantins Jefimovs, 2014 .

Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

Helmut Schift, Arne Schleunitz, H. Schift, 2010 .

Anti-adhesive layers on Nickel stamps for nanoimprint lithography

Helmut Schift, Rüdiger Kötz, Celestino Padeste, 2004 .

Organic-inorganic-hybrid-polymer microlens arrays with tailored optical characteristics and multi-focal properties.

Loïc Jacot-Descombes, Helmut Schift, Jürgen Brugger, 2015, Optics express.

Innovative and Tailor-made Resist and Working Stamp Materials for Advancing NIL-based Production Technology

Gabi Gruetzner, Helmut Schift, Marko Vogler, 2013 .

A Novel Approach to Produce Protein Nanopatterns by Combining Nanoimprint Lithography and Molecular Self-Assembly

Marcus Textor, Helmut Schift, Rolando Barbucci, 2004 .

Combining nanoimprint lithography and a molecular weight selective thermal reflow for the generation of mixed 3D structures

Helmut Schift, Marko Vogler, Arne Schleunitz, 2011 .

Mobility based 3D simulation of selective, viscoelastic polymer reflow using surface evolver

Robert Kirchner, Helmut Schift, 2014 .

Quantitative analysis of the molding of nanostructures

Helmut Schift, Jens Gobrecht, H. Schift, 2000 .