V. Nascov

2D Multiple Beam Interference Lithography

P.C. Logofatu, V. Damian, A.D. Apostol, 2006, 2006 International Semiconductor Conference.

On a diffractive optical element

M. Kusko, D. Apostol, V. Damian, 2004, 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748).

Scatterometry, an optical metrology technique for lithography

D. Apostol, P.C. Logofatu, V. Damian, 2004, 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748).