Bhaskar Nagabhirava

Introduction of pre-etch deposition techniques in EUV patterning

John Arnold, Lei Sun, Dominik Metzler, 2018, Advanced Lithography.

Plasma etch challenges with new EUV lithography material introduction for patterning for MOL and BEOL

John Arnold, Peng Wang, Yann Mignot, 2015, Advanced Lithography.