Alain C. Diebold

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The Status and Future of Metrology: Challenges from the ITRS Metrology Roadmap

Alain C. Diebold, 2005 .

Frontiers of Characterization and Metrology for Nanoelectronics: 2009

David G. Seiler, Robert McDonald, Alain C. Diebold, 2007 .

Preface: Frontiers of Characterization and Metrology for Nanoelectronics: 2011

David G. Seiler, Alain C. Diebold, Robert McDonald, 2011 .

2005 International Conference on Characterization and Metrology for ULSI Technology

David G. Seiler, Alain C. Diebold, Alain C. Diebold, 2005 .

2013 ITRS Metrology Roadmap | NIST

Ndubuisi G. Orji, Alain C. Diebold, 2014 .

2012 Updates to the International Technology Roadmap for Semiconductors (ITRS) Metrology Chapter | NIST

Alain C. Diebold, Alain C. Diebold, Christina A. Hacker, 2013 .

Networked analysis systems

Alain C. Diebold, 1995, Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

Overview of metrology requirements based on the 1994 National Technology Roadmap for semiconductors

Alain C. Diebold, 1995, Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology, Austin, Texas 24-28 March 2003

Thomas J. Shaffner, David G. Seiler, Alain C. Diebold, 2003 .

Metrology Requirements and the Limits of Measurement Technology for the Semiconductor Industry

Alain C. Diebold, A. Diebold, 2003 .

Frontiers of Characterization and Metrology for Nanoelectronics: 2011 | NIST

Amal Chabli, David G. Seiler, Alain C. Diebold, 2009 .

Challenges facing 3D information extraction by CD-SEM and scatterometry

Alain C. Diebold, 2001, SPIE LASE.