Bernard Fay

6 – Replication techniques

Jacques Trotel, Bernard Fay, Jacques Trotel, 1980 .

Aqueous Base Developed, Single Level Resist For Submicron X-Ray Lithography

Bernard Fay, Elizabeth Tai, Wayne E. Feely, 1987, Advanced Lithography.

Triaxial Relaxation Tests on a Soft Clay

Bernard Fay, V. Silvestri, B. Fay, 1988 .

Advanced optical lithography development, from UV to EUV

Bernard Fay, B. Fay, 2002 .

X‐ray replication of masks using the synchrotron radiation produced by the ACO storage ring

Bernard Fay, Y. Petroff, Jacques Trotel, 1976 .