Yoshinori Takao

发表

A new aspect of plasma-induced physical damage in three-dimensional scaled structures — Sidewall damage by stochastic straggling and sputtering

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2014, 2014 IEEE International Conference on IC Design & Technology.

Atomistic simulations of plasma process-induced Si substrate damage - Effects of substrate bias-power frequency

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2013, Proceedings of 2013 International Conference on IC Design & Technology (ICICDT).

Experimental demonstration of oblique ion incidence with sheath control plates during plasma etching of silicon

Yoshinori Takao, Kouichi Ono, Koji Eriguchi, 2015 .

Optimization problems for plasma-induced damage - A concept for plasma-induced damage design

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2012, 2012 IEEE International Conference on IC Design & Technology.

Random telegraph noise as a new measure of plasma-induced charging damage in MOSFETs

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2014, 2014 IEEE International Conference on IC Design & Technology.

Development of a miniature electrothermal thruster using microwave-excited microplasmas for ultra small satellites

Yoshinori Takao, 2007 .

Modeling of ion-bombardment damage on Si surfaces for in-line analysis

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2010 .

Comprehensive Modeling of Threshold Voltage Variability Induced by Plasma Damage in Advanced Metal-Oxide-Semiconductor Field-Effect Transistors

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2010 .

Development and modeling of a microwave-excited microplasma thruster

Yoshinori Takao, Kouichi Ono, 2004 .

Numerical and experimental study of microwave-excited microplasma and micronozzle flow for a microplasma thruster

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2009 .

Microwave-excited microplasma thruster: a numerical and experimental study of the plasma generation and micronozzle flow

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2008 .

Microplasma thruster for ultra-small satellites: Plasma chemical and aerodynamical aspects

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2008 .

Microwave-excited microplasma thruster with helium and hydrogen propellants

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2011 .

Effects of plasma-induced charging damage on random telegraph noise in metal–oxide–semiconductor field-effect transistors with SiO2 and high-k gate dielectrics

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2014 .

Microwave-sustained miniature plasmas for an ultra small thruster

Yoshinori Takao, Kouichi Ono, Kazuo Takahashi, 2006 .

Model for Bias Frequency Effects on Plasma-Damaged Layer Formation in Si Substrates

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2010 .

Microwave-excited Microplasma Thruster with Applied Magnetic Field

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2011 .

Trade-Off Relationship between Si Recess and Defect Density Formed by Plasma-Induced Damage in Planar Metal–Oxide–Semiconductor Field-Effect Transistors and the Optimization Methodology

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2011, Japanese Journal of Applied Physics.

Modeling of plasma-induced damage and its impacts on parameter variations in advanced electronic devices

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2011 .

A miniature electrothermal thruster using microwave-excited plasmas: a numerical design consideration

Yoshinori Takao, Kouichi Ono, Y. Takao, 2006 .

A miniature electrothermal thruster using microwave-excited microplasmas: Thrust measurement and its comparison with numerical analysis

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2007 .

Plasma Diagnostics and Thrust Performance Analysis of a Microwave-Excited Microplasma Thruster

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2006 .

Performance Testing of a Miniature Electrothermal Thruster Using Microwave-Excited Microplasmas

Yoshinori Takao, Kouichi Ono, Y. Takao, 2006 .

Comparative Study of Plasma-Charging Damage in High-$k$ Dielectric and p--n Junction and Their Effects on Off-State Leakage Current of Metal--Oxide--Semiconductor Field-Effect Transistors

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2011 .

Microfabricated emitter array for an ionic liquid electrospray thruster

Yoshinori Takao, Toshiyuki Tsuchiya, Y. Takao, 2017 .

Effects of straggling of incident ions on plasma-induced damage creation in “fin”-type field-effect transistors

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2014 .

A new prediction model for effects of plasma-induced damage on parameter variations in advanced LSIs

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2011, 2011 IEEE International Conference on IC Design & Technology.

Analytic Model of Threshold Voltage Variation Induced by Plasma Charging Damage in High-k Metal-Oxide-Semiconductor Field-Effect Transistor

Koji Eriguchi, Yoshinori Takao, Kouichi Ono, 2011 .