Keigo Koida

Competitive reactions of carbon deposition and oxidation on the surface of Mo/Si multilayer mirrors by EUV irradiation

Masahito Niibe, Keigo Koida, 2009, Optics + Optoelectronics.

Protection from surface oxidation of Ru capping layers for EUVL projection optics mirrors by introducing hydrocarbon gas

Takahiro Nakayama, Masahito Niibe, Takashi Aoki, 2008, SPIE Advanced Lithography.

Study on contamination of projection optics surface for extreme ultraviolet lithography

Masahito Niibe, Keigo Koida, M. Niibe, 2009 .

In situ x-ray absorption near-edge structure analysis for extreme ultraviolet lithography projection optics contamination

Masahito Niibe, Katsuhiko Murakami, Takashi Aoki, 2007 .