Ken Kagaya

Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology

Katsuyuki Machida, Hiroshi Toshiyoshi, Noboru Ishihara, 2013 .

Sub-1G MEMS accelerometer

Katsuyuki Machida, Hiroshi Toshiyoshi, Kazuya Masu, 2013, 2013 IEEE SENSORS.

Novel Sensor Structure and Its Evaluation for Integrated Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer

Katsuyuki Machida, Hiroshi Toshiyoshi, Noboru Ishihara, 2013 .