Lars Markwort

High speed full wafer monitoring of surface, edge and bonding interface for 3Dstacking

Anne Jourdain, Sandip Halder, Andy Miller, 2011, 2011 IEEE 13th Electronics Packaging Technology Conference.

Full wafer macro-CD imaging for excursion control of fast patterning processes

Christoph Kappel, Pierre-Yves Guittet, Lars Markwort, 2010, Advanced Lithography.