F. C. Tang

Investigation of phase variation impact on CPL PSM for low k1 imaging

Stephen D. Hsu, Douglas J. Van Den Broeke, Chun-hung Lin, 2003, Photomask Japan.

Study of dry etching pattern profile of chromeless phase lithography (CPL) mask

J. Fung Chen, Stephen D. Hsu, Douglas J. Van Den Broeke, 2003, SPIE Photomask Technology.

Application of java and VRML visualisation tools in store release wind-tunnel testing

F. C. Tang, M. Ahmadi, D. M. Orchard, 2005 .