Paul J. Gyugyi

Supervisory Control of a

Rapid Thermal Multiprocessor, S. Balemi, G. J. Hoffmann, 1993 .

Rapid thermal multiprocessing for a programmable factory for adaptable manufacturing of ICs

Charles D. Schaper, Mehrdad M. Moslehi, Krishna C. Saraswat, 1994 .

MODEL-BASED CONTROL OF RAPID

Thomas Kailath, Paul J. Gyugyi, Gene F. Franklin, 1992 .

Control of Rapid Thermal Processing: A System Theoretic Approach

Thomas Kailath, Paul J. Gyugyi, Gene F. Franklin, 1993 .

Convex optimization of wafer temperature trajectories for rapid thermal processing

Thomas Kailath, Paul J. Gyugyi, Gene F. Franklin, 1993, Proceedings of IEEE International Conference on Control and Applications.

Model-based control of rapid thermal processing systems

Thomas Kailath, Paul J. Gyugyi, Gene F. Franklin, 1992, [Proceedings 1992] The First IEEE Conference on Control Applications.

Supervisory control of a rapid thermal multiprocessor

S. Balemi, Paul J. Gyugyi, H. Wong-Toi, 1993, IEEE Trans. Autom. Control..

Modeling and control of rapid thermal processing

Thomas Kailath, PooGyeon Park, Krishna C. Saraswat, 1992, Other Conferences.