Yun-Qi Sui

OCD Metrology Evaluation of p-MOS Silicon Recess with Three Dimensional Design Pattern

Yi Huang, Chao-Wei Li, Xiao-Ying Meng, 2012 .

2-D Modeling Capability Certification of Optical Critical Dimension (OCD) Metrology Tool by Sigma Shape PMOS Silicon Recess Structure

Yi Huang, Yun-Qi Sui, Si-Yuan Yang, 2014 .