Mark E. Yelverton

Factory-wide run-to-run process control

Kostas Tsakalis, Mark E. Yelverton, Kevin Stoddard, 1999 .

Improving diffusion furnace capability using model-based temperature control in a production environment

Mark E. Yelverton, K. Stoddard, B. Cusson, 1997, 1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023).