Ryo Tujimura

Study of device mass production capability of the character projection based electron beam direct writing process technology toward 14 nm node and beyond

Yoshio Ito, Shinji Sugatani, Yasushi Takahashi, 2012, Advanced Lithography.

Study of device mass production capability of the character projection based electron beam direct writing process technology toward 14 nm node and beyond

Yoshio Ito, Shinji Sugatani, Yasushi Takahashi, 2012 .