Jens Flügge

发表

Dimensional Micro- and Nanometrology at PTB

Uwe Brand, Gaoliang Dai, Harald Bosse, 2011 .

Challenges in nanometrology: high precision measurement of position and size

Gaoliang Dai, Frank Scholze, Bernd Bodermann, 2014 .

Optical resonator formed with etched silicon micromirrors

Jens Flügge, Andreas Dietzel, Ingmar Leber, 2019 .

Dimensionelle Metrologie an ebenen Substraten mit Mikro- und NanostrukturenDimensional Metrology on Plane Substrates with Micro- and Nanostructures

Harald Bosse, Rainer Köning, Jens Flügge, 2009 .

Das neue Antriebskonzept am Nanometerkomparator der PTB

Eberhard Manske, Rainer Köning, Jens Flügge, 2017 .

Micro Coordinate Measurement Machine (μCMM) using voice coil actuator with interferometric position feedback

Hans-Ulrich Danzebrink, Sebastian Bütefisch, Jens Flügge, 2019, International Symposium on Precision Engineering Measurement and Instrumentation.

The road towards accurate optical width measurements at the industrial level

Bernd Bodermann, Rainer Köning, Jens Flügge, 2013, Optical Metrology.

Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage

Rainer Köning, Jens Flügge, Paul Köchert, 2014 .

Neue Wege der metrologischen Rückführbarkeit in der Längen- und Koordinatenmesstechnik

Karin Kniel, Jens Flügge, Harald Bosse, 2019 .

Achievement of sub nanometer reproducibility in line scale measurements with the nanometer comparator

Rainer Köning, Jens Flügge, Harald Bosse, 2007, SPIE Advanced Lithography.

Implementing a ultra-precision positioning device using interferometric feedback signal and a moving coil actuator

Eberhard Manske, Rainer Köning, Jens Flügge, 2012 .

Implementing registration measurements on photomasks at the Nanometer Comparator

Harald Bosse, Rainer Köning, Jens Flügge, 2012 .

A differential interferometric heterodyne encoder with 30 picometer periodic nonlinearity and sub-nanometer stability

Lauryna Siaudinyte, Rainer Köning, Jens Flügge, 2017 .

Fast and accurate: high-speed metrological large range AFM for surface and nanometrology

Gaoliang Dai, Ludger Koenders, Jens Flügge, 2017 .

Nanotrace: the investigation of non-linearity in optical interferometers using X-ray interferometry

Marco Pisani, Jens Flügge, Antti Lassila, 2009 .

A method for the in situ determination of Abbe errors and their correction

Harald Bosse, Rainer Köning, Jens Flügge, 2007 .

A revised treatment of the influence of the sample support on the measurement of line scales and the consequences for its use to disseminate the unit of length

Harald Bosse, Rainer Köning, Jens Flügge, 2009 .

Phase measurement of various commercial heterodyne He–Ne-laser interferometers with stability in the picometer regime

Eberhard Manske, Rainer Köning, Jens Flügge, 2012 .

A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm

Birk Andreas, Rainer Köning, Jens Flügge, 2012 .