Michael A. Guillorn

发表

Carbon-nanofiber-based probing arrays for multipoint integration with cellular matrices

Michael L. Simpson, Timothy E. McKnight, Anatoli V. Melechko, 2004, SPIE Optics East.

Materials characterization for process integration of multi-channel gate all around (GAA) devices

Michael A. Guillorn, Gangadhara Raja Muthinti, Nicolas Loubet, 2017, Advanced Lithography.

Pattern collapse mitigation strategies for EUV lithography

Robert L. Bruce, Michael A. Guillorn, Dario L. Goldfarb, 2012, Advanced Lithography.

Advanced in-line optical metrology of sub-10nm structures for gate all around devices (GAA)

Nelson Felix, Raja Muthinti, Cornel Bozdog, 2016, SPIE Advanced Lithography.

Optically and electrically addressed carbon nanofiber electrode arrays for intracellular interfacing

Michael L. Simpson, Timothy E. McKnight, Anatoli V. Melechko, 2004, SPIE Optics East.

Hysteretic drain-current behavior due to random telegraph noise in Scaled-down FETs with high-κ/metal-gate stacks

Yu Zhu, Michael A. Guillorn, Wilfried Haensch, 2010, 2010 International Electron Devices Meeting.

Fin formation using graphoepitaxy DSA for FinFET device fabrication

Akiteru Ko, Nelson Felix, Nihar Mohanty, 2015, Advanced Lithography.

Pattern transfer of directed self-assembly (DSA) patterns for CMOS device applications

Sebastian Engelmann, Joy Cheng, Michael A. Guillorn, 2013, Advanced Lithography.

DSA patterning options for FinFET formation at 7nm node

Akiteru Ko, Nelson Felix, Mark Somervell, 2016, SPIE Advanced Lithography.

High chi block copolymer DSA to improve pattern quality for FinFET device fabrication

Chi-Chun Liu, C. Grant Willson, Christopher J. Ellison, 2016, SPIE Advanced Lithography.

Self-aligned line-space pattern customization with directed self-assembly graphoepitaxy at 24nm pitch

Markus Brink, Joy Cheng, Michael A. Guillorn, 2015, Advanced Lithography.

Pattern transfer of directed self-assembly patterns for CMOS device applications

Sebastian Engelmann, Joy Cheng, Michael A. Guillorn, 2013 .

Electrical characterization of FinFETs with fins formed by directed self assembly at 29 nm fin pitch using a self-aligned fin customization scheme

Markus Brink, Sebastian Engelmann, Michael A. Guillorn, 2014, 2014 IEEE International Electron Devices Meeting.

Time-resolved diagnostics of single wall carbon nanotube synthesis by laser vaporization

Michael A. Guillorn, Henrik Schittenhelm, David B. Geohegan, 2002 .

Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

Mitchel J. Doktycz, Michael L. Simpson, Timothy E. McKnight, 2003 .

Integrally gated carbon nanotube field emission cathodes produced by standard microfabrication techniques

V. I. Merkulov, Michael L. Simpson, Michael A. Guillorn, 2003 .

Vertically Aligned Carbon Nanofibers and Related Structures: Controlled Synthesis and Directed Assembly

Michael L. Simpson, Timothy E. McKnight, Anatoli V. Melechko, 2005 .

Alignment mechanism of carbon nanofibers produced by plasma-enhanced chemical-vapor deposition

Michael L. Simpson, Anatoli V. Melechko, Michael A. Guillorn, 2001 .

Self-aligned gated field emission devices using single carbon nanofiber cathodes

Michael L. Simpson, Anatoli V. Melechko, Michael A. Guillorn, 2002 .

Directed self-assembly for ever-smaller printed circuits

Joy Cheng, Michael A. Guillorn, Matthew E. Colburn, 2013 .

Microarrays of vertically-aligned carbon nanofiber electrodes in an open fluidic channel

Michael L. Simpson, Timothy E. McKnight, Anatoli V. Melechko, 2004 .

Subtractive W contact and local interconnect co-integration (CLIC)

Michael A. Guillorn, Eric A. Joseph, Sebastian U. Engelmann, 2013, 2013 IEEE International Interconnect Technology Conference - IITC.

Sub-30 nm pitch line-space patterning of semiconductor and dielectric materials using directed self-assembly

Sebastian Engelmann, Joy Cheng, Michael A. Guillorn, 2012 .

Condensed phase growth of single-wall carbon nanotubes from laser annealed nanoparticulates

David C. Joy, Michael A. Guillorn, Henrik Schittenhelm, 2001 .

Fabrication of dissimilar metal electrodes with nanometer interelectrode distance for molecular electronic device characterization

R. C. Tiberio, Michael L. Simpson, Michael A. Guillorn, 2000 .