Werner Steinhögl

Challenges of interconnection technology till the end of the roadmap and beyond

Manfred Engelhardt, G. Steinlesberger, Günther Schindler, 2002 .

Carbon nanotubes in interconnect applications

Franz Kreupl, Eugen Unger, Georg S. Duesberg, 2002 .

Impact of line edge roughness on the resistivity of nanometer-scale interconnects

Manfred Engelhardt, Gernot Steinlesberger, Günther Schindler, 2004 .

Electrical assessment of copper damascene interconnects down to sub-50 nm feature sizes

Manfred Engelhardt, G. Steinlesberger, Emmerich Bertagnolli, 2002 .

Tungsten interconnects in the nano-scale regime

Manfred Engelhardt, Gernot Steinlesberger, G. Scheinbacher, 2005 .

Impact of Annealing on the Resistivity of Ultrafine Cu Damascene Interconnects

Manfred Engelhardt, G. Steinlesberger, Emmerich Bertagnolli, 2003 .

Electrical characterization of copper interconnects with end-of-roadmap feature sizes

Manfred Engelhardt, Gernot Steinlesberger, Günther Schindler, 2003 .