A. Greene
发表
K. Cheng,
Victor Chan,
T. M. Levin,
2019,
IEEE Transactions on Semiconductor Manufacturing.
K. Cheng,
J. Strane,
T. Levin,
2019,
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
P. D. Kirsch,
K. Matthews,
D.-H Kim,
2013,
2013 IEEE International Electron Devices Meeting.
P. Oldiges,
C. Park,
N. Loubet,
2016,
2016 IEEE International Electron Devices Meeting (IEDM).
C. Park,
N. Loubet,
B. Haran,
2019,
2019 IEEE International Electron Devices Meeting (IEDM).