Tung-Ying Lee
发表
Yu-Yuan Ke,
Kuang-Hsiu Chen,
Shin-Ru Chen,
2020,
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Investigation and optimization of STI dry-etch induced overlay through patterned wafer geometry tool
Tung-Ying Lee,
Tsu-Wen Huang,
Ying-Cheng Chuang,
2021,
Advanced Lithography.