Song-Yun Kang

Effects of surface conditions of the Focus Ring on etching uniformity

Tsuyoshi Moriya, Ayuta Suzuki, Nobutoshi Terasawa, 2010, 2010 International Symposium on Semiconductor Manufacturing (ISSM).

Plasma Chemistry of Octafluorocyclopentene/Argon/Oxygen Mixtures

Ikuo Sawada, Peter L. G. Ventzek, Song-Yun Kang, 2008 .

Characteristics of silicon etching by silicon chloride ions

Satoshi Hamaguchi, Song-Yun Kang, K. Karahashi, 2013 .