Anton Bauer

Particle free handling of substrates

Markus Pfeffer, Hassan Samadi, Roswitha Altmann, 2015, 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).

Characterization of Diverse Gate Oxides on 4H-SiC 3D Trench-MOS Structures

Lothar Frey, Michael Grieb, Anton Bauer, 2013 .

Comparison of the Threshold-Voltage Stability of SiC MOSFETs with Thermally Grown and Deposited Gate Oxides

Peter Friedrichs, Tsunenobu Kimoto, Heiner Ryssel, 2010 .