Matthias Heschel
发表
Matthias Müllenborn,
Pirmin Hermann Otto Rombach,
Udo Klein,
2001
.
Ole Hansen,
Matthias Müllenborn,
Pirmin Hermann Otto Rombach,
2000
.
Matthias Heschel,
Siebe Bouwstra,
Jochen Kuhmann,
1998,
Smart Structures.
Matthias Müllenborn,
Pirmin Hermann Otto Rombach,
Udo Klein,
2001
.
Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon
Matthias Heschel,
Siebe Bouwstra,
1998
.
Matthias Heschel,
Kerstin Worhoff,
Rene G. Heideman,
2004,
SPIE Photonics Europe.
Jochen Kuhmann,
Matthias Heschel,
Siebe Bouwstra,
1998,
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
Matthias Müllenborn,
Matthias Heschel,
Siebe Bouwstra,
1996
.
Matthias Müllenborn,
Matthias Heschel,
Siebe Bouwstra,
1997
.
Matthias Müllenborn,
Matthias Heschel,
Siebe Bouwstra,
1996
.