Volker Dobler

Laser cleaning of silicon wafers: mechanisms and efficiencies

Johannes Boneberg, Paul Leiderer, Dieter Baeuerle, 2002, International Symposium on Laser Precision Microfabrication.

Surface acceleration during dry laser cleaning of silicon

Johannes Boneberg, J. P. Boquillon, Roland Oltra, 1999 .

Laser cleaning of silicon wafers : prospects and problems

Johannes Boneberg, Mario Mosbacher, Micha Bertsch, 2003 .

Two-dimensional pressure measurements with nanosecond time resolution

Johannes Boneberg, Volker Dobler, P. Leiderer, 1999 .

Universal threshold for the steam laser cleaning of submicron spherical particles from silicon

Johannes Boneberg, Mario Mosbacher, Volker Dobler, 2000, Applied Physics A.