Ilhami H. Torunoglu

OPC on a single desktop: a GPU-based OPC and verification tool for fabs and designers

Ilhami H. Torunoglu, Ahmet Karakas, Erich Elsen, 2010, Advanced Lithography.

A GPU-based full-chip source-mask optimization solution

Ilhami H. Torunoglu, Ahmet Karakas, Erich Elsen, 2010, Advanced Lithography.

A GPU-based full-chip inverse lithography solution for random patterns

Ilhami H. Torunoglu, Ahmet Karakas, Erich Elsen, 2010, Advanced Lithography.

An advanced modeling approach for mask and wafer process simulation

Ilhami H. Torunoglu, Ahmet Karakas, Erich Elsen, 2010, Photomask Technology.