Volker Boegli
发表
Erik H. Anderson,
L. P. Muray,
Volker Boegli,
1997
.
Hans W. P. Koops,
Klaus Edinger,
Michael Budach,
2003,
Photomask Japan.
Klaus Edinger,
Michael Budach,
Alan R. Stivers,
2004,
Photomask Japan.
Christian Ehrlich,
Klaus Edinger,
Volker Boegli,
2005,
Other Conferences.
Rudolf Schmidt,
Hans W. P. Koops,
Klaus Edinger,
2002,
Photomask Technology.
Volker Boegli,
Nicole Auth,
Uli Hofmann,
2006,
SPIE Photomask Technology.
Wolfgang Degel,
Klaus Edinger,
Volker Boegli,
2005,
Photomask Japan.
Erik H. Anderson,
L. P. Muray,
Volker Boegli,
1995
.
Holger Sailer,
Joerg Butschke,
Mathias Irmscher,
2008,
Photomask Technology.
Hans W. P. Koops,
Klaus Edinger,
Johannes Bihr,
2003,
European Mask and Lithography Conference.
Hans W. P. Koops,
Petra Spies,
Klaus Edinger,
2004
.
Volker Boegli,
Stephen A. Rishton,
Richard L. Lozes,
2001
.
Volker Boegli,
U. Hofmann,
Lee H. Veneklasen,
1999
.
Erik H. Anderson,
Volker Boegli,
Vincent V. Wong,
1993
.
Volker Boegli,
Allan L. Sagle,
Stephen A. Rishton,
1999
.
Mark L. Schattenburg,
Erik H. Anderson,
Volker Boegli,
1991
.
Volker Boegli,
Stephen A. Rishton,
U. Hofmann,
2000
.