M. P. Orthner

Novel design for an ultra high precision 3D micro probe for CMM applications

Florian Solzbacher, Gaoliang Dai, H.-U. Danzebrink, 2010 .

High speed wafer scale bulge testing for the determination of thin film mechanical properties.

F. Solzbacher, M. P. Orthner, L. W. Rieth, 2010, The Review of scientific instruments.