M. Nieto

Erosion and degradation of EUV lithography collector mirrors under particle bombardment

Jean Paul Allain, Ahmed Hassanein, M. Nieto, 2005, SPIE Advanced Lithography.

Energetic and thermal Sn interactions and their effect on EUVL source collector mirror lifetime at high temperatures

Vivek Bakshi, Jean Paul Allain, Ahmed Hassanein, 2007, SPIE Advanced Lithography.

Effect of charged-particle bombardment on collector mirror reflectivity in EUV lithography devices

M. Nieto, P. Plotkin, J. P. Allain, 2006, SPIE Advanced Lithography.